Kaufman Gridless (End-Hole Type) Ion Source
Cafmangridless ion source set
For more details, please contact us or download the catalog. *This catalog is in English.
- Company：アールエムテック
- Price：Other
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Kaufman Grid Type Ion Source
The KRI grid ion source is available in DC type and RF type.
Kaufman-type gridded ion gun RFICP ion source grid sizes: 4cm, 10cm, 14cm, 22cm, 36cm DC ion source grid sizes: 1cm, 4cm, 8cm, 10cm, 16cm The versatile gridded series of broad beam ion sources are available in different sizes which cover both R&D and high yield production requirements. Large ion beam sources meet critical output performance for uniform coverage over wide process zones. For more details, please contact us or download the catalog. *This catalog is in English.
- Company：アールエムテック
- Price：Other
